RF Switch

  
RF MEMS switches, switched capacitors and varactors, which can replace field effect transistor (FET) switches and PIN diodes, are classified by actuation method (electrostatic, electrothermal, magnetic, piezoelectric), by axis of deflection (laterally, vertically), by circuit configuration (series, shunt), by clamp configuration (cantilever, fixed-fixed beam), or by contact interface (capacitive, ohmic) [2]. Electrostatically-actuated RF MEMS components offer low insertion loss and high isolation, high linearity, high power handling and high Q factor, do not consume power, but require a high supply voltage and hermetic wafer level packaging (WLP) (anodic or glas frit wafer bonding) or single chip packaging (SCP) (thin film capping, liquid crystal polymer (LCP) or low temperature co-fired ceramic (LTCC) packaging). 
 

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